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A Combination Fringe Counting and Interpolation Heterodyne Laser Interferometer Position Measurement System

Authors: [tex2html_wrap4268]I.W. Hunter, P. Charette (MPB Technologies)

Investigator username: hunter

Category: robotics

Subcategory: manipulators and actuators

This device is being developed to provide a position resolution of 1 nm in 10 mm (10 million to 1 dynamic range) at frequencies up to 1 MHz, for use in microrobotics.